Quantification of a Ti(CxN1−x) based multilayer by Auger Electron Spectroscopy

As an illustration, a Ti(CxN1−x) based multilayer deposited on a hardmetal substrate was investigated. This quantification method was successfully used to evidence three different layers and the diffusion phenomenon at the interfaces between the layers. This study was completed with a quantitative SIMS depth profile that the high sensitivity and depth resolution allowed to measure the small variations of composition lower than the uncertainty of AES.