Verification of surface polarity of O-face ZnO(0 0 0 1¯) by quantitative modeling analysis of Auger electron spectroscopy

► Quantitative Auger intensity ratios to predict macroscopic surface type to Zn-face or O-face can be obtained using hard sphere model and considering electron mean free paths. ► Calculation of electron signals from 6-layer depth is the best condition in estimating Auger intensity ratios. ► The ratio deviated from the estimation reference after surface treated by annealing or sputtering is classified to Zn-rich or O-rich surface. ► A Zn-rich surface may exist on an O-face surface. ► Surface type of a composite material can be quickly obtained by quantitative analysis of Auger intensity ratio.