Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals

► We simulated the hydrogenated carbon film growth from CH radicals using classical molecular dynamics method. ► Effects of incident energy on the film structure were investigated. ► The contribution of adsorption, reactions, implantation and sputtering to film growth were analyzed. ► The optimized incident energy of CH is suggested in the range from 10 to 70 eV for gaining smooth film.