Preparation and characterization of TaNbTiW multi-element alloy films

In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of −0.1 to −2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.

► Multi-element alloy films were deposited by a novel combination approach. ► Alloy films are the single phase solid solution with the bcc structure. ► Structure and property of alloy film strongly depend on the film composition. ► Maximum hardness and elastic modulus of alloy films reached 5.2 and 127.2 GPa.