Growth of thin zirconium oxide films on the 6H-SiC(0Â 0Â 0Â 1) surface

► The growth of thin zirconium oxides film on 6H-SiC(0 0 0 1) surface has been presented. ► Zirconium dioxide is one of the high-κ dielectric materials. ► The experiment was carried out using the methods: XPS, LEED, STM. ► The growth of ZrO2 films proceeded almost in layer-by-layer mode with some irregular islands.