کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5365018 1388324 2007 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Thermal model for nanosecond laser sputtering at high fluences
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Thermal model for nanosecond laser sputtering at high fluences
چکیده انگلیسی

The vaporization effect and the following plasma shielding generated by high-power nanosecond pulsed laser ablation are studied in detail based on the heat flux equation. As an example of Si target, we obtain the time evolution of the calculated surface temperature, ablation rate and ablation depth by solving the heat flow equations using a finite difference method. It can be seen that plasma shielding plays a more important role in the ablation process with time. At the same time, the variation of ablation depth per pulse with laser fluence is performed. Our numerical results are more agreed with the experiment datum than other simulated results. The result shows that the plasma shielding is very important.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 14, 15 May 2007, Pages 6144-6148
نویسندگان
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