Mechanical properties of the plasma-enhanced magnetron sputtering Si-C-N coatings

The mechanical properties of plasma-enhanced magnetron sputtering Si-C-N hard coatings with various compositions are characterized. The effect of chemical composition on the microstructure and properties of coating is investigated. The results show that the microstructure and mechanical properties of Si-C-N coatings are very sensitive to chemical composition. The nanocrystalline/amorphous composite structure is beneficial to the coating's mechanical properties. It also reveals that Si-C-N coating with low Si and high C concentrations has the highest hardness (≥40 GPa) and the best wear property with dry friction coefficient about 0.2.