کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5365270 | 1388328 | 2007 | 6 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Electrical and optical properties of Al-doped ZnO thin films by sol-gel process Electrical and optical properties of Al-doped ZnO thin films by sol-gel process](/preview/png/5365270.png)
Al-doped ZnO (AZO) thin films oriented along the (0 0 2) plane have been prepared by the sol-gel process and their electrical and optical properties with post-deposition heating temperature were investigated. The preferred c-axis orientation along the (0 0 2) plane was enhanced with increasing post-deposition heating temperature and the surface of the films showed a uniform and nano-sized microstructure. The electrical resistivity of the films decreased from 73 to 22 Ω cm as the post-deposition heating temperature increased from 500 to 650 °C; however, the film postheated at 700 °C increased greatly to 580 Ω cm. The optical transmittance of the films postheated below 650 °C was over 86%, but it decreased at 700 °C. The electrical and optical properties of the AZO films with post-deposition heating temperature are discussed.
Journal: Applied Surface Science - Volume 253, Issue 11, 30 March 2007, Pages 4911-4916