کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5365804 | 1388338 | 2007 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Zinc oxide based film bulk acoustic resonator as mass sensor was fabricated by multi-target magnetron sputtering under optimized deposition condition. Each layer of the device was well crystallized and highly textural observed by transmission electron microscopy and X-ray diffraction measurement. Through piezoelectric test, the device vibrated with significant distance. The influence of top electrode on resonant frequency and the bio-specimen of mass loading effect were investigated. Data show that the device has qualified properties as mass biosensor, with a resonant frequency of 3-4 GHz and a high sensitivity of 8-10 kHz cm2/ng.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 24, 15 October 2007, Pages 9372-9380
Journal: Applied Surface Science - Volume 253, Issue 24, 15 October 2007, Pages 9372-9380
نویسندگان
Zhi Yan, Zhitang Song, Weili Liu, Hongxuan Ren, Ning Gu, Xiaoyuan Zhou, Li Zhang, Yu Wang, Songlin Feng, Lihui Lai, Jianzhao Chen,