کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5366023 1388342 2007 15 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis, structure, microstructure and mechanical characteristics of MOCVD deposited zirconia films
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Synthesis, structure, microstructure and mechanical characteristics of MOCVD deposited zirconia films
چکیده انگلیسی
Zirconia (ZrO2) thin films were deposited by metal organic chemical vapor deposition (MOCVD) on (1 0 0) Si over temperature and pressure ranges from 700 to 900 °C and 100 to 2000 Pa, respectively. The oxide films were characterized by field emission microscopy and X-ray diffraction so that microstructure and ratios of monoclinic and tetragonal phases could be estimated according to the process conditions. The mechanical behaviour of the substrate-film systems was investigated using Vickers micro-indentation and Berkovitch nano-indentation tests. The characteristics of silicon are not modified by the presence of a thin film of silicon oxide (10 nm), formed in the reactor during heating. Young's modulus and the hardness of tetragonal zirconia phase, 220 and 15 GPa, respectively, are greater than values obtained for monoclinic phase, 160 and 7 GPa, respectively. The zirconia films are well adherent and the toughness of tetragonal zirconia phase is greater than that of monoclinic phase.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 10, 15 March 2007, Pages 4626-4640
نویسندگان
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