Modification of laser induced damage threshold of ZrO2 thin films by using time-temperature gradient annealing

As a result of using time-temperature gradient annealing, the structural and optical properties and hence, thermal properties of ZrO2 thin films deposited by electron gun, enhanced considerably compared with rapid thermal annealing. Also, it can be seen time- temperature gradient annealing caused to decrease the total stress and number of thermal barrier along the film. Therefore, according to our experimental results, which is agree with theoretical analysis, the laser induced damage threshold of ZrO2 films can be enhanced significantly compared with rapid annealing procedure.

► In this study we consider the effect of time-temperature gradient annealing, TTGA, on laser induced damage threshold. ► ZrO2 optical coatings is one of the best candidate of optical films. ► Optical, thermal and mechanical improved by TTGA. ► Significant enhancement of LIDT via TTGA.