Photocatalytic properties of TiO2 thin films obtained by glancing angle deposition

Titanium dioxide (TiO2) thin films with different nanostructures such as nano-particles and separated vertical columns were grown by glancing angle deposition (GLAD) in an electron beam evaporation system. The photocatalytic properties of grown TiO2 films with different deposition angles and different annealing temperatures were evaluated by following decomposition of methyl orange under ultraviolet (UV) light irradiation. The results suggest that increased surface area due to the GLAD process could improve the photocatalytic properties of TiO2 films.

► Nanostructured TiO2 films were prepared by E-beam evaporation via Glancing Angle Deposition. ► Their structural, optical and photocatalytic properties have been investigated. ► The surface factor is proved a good parameter to estimate films' surface area and to judge the photocatalytic property. ► The film's surface factor can be tuned to enhance photocatalytic activities by controlling the glancing angle.