کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5367051 | 1388360 | 2009 | 5 صفحه PDF | دانلود رایگان |
Effect of 5.0% diluted NH4Cl aqueous solution was comparably investigated on the postdeposition surface texture of the as-deposited smooth aluminum-doped zinc oxide (AZO) films by direct current pulse reactive magnetron sputtering (DCP-sputtering) and direct current reactive magnetron sputtering (DC-sputtering). The as-deposited AZO films by DCP-sputtering showed an effective surface texture for light trapping upon the etching of 5.0% diluted NH4Cl solution, while the as-deposited AZO films by DC-sputtering demonstrated an obscure surface texture upon the same etching treatment. The different result might be attributable to a big difference in film strain and film compactness. The formation of interstitial Zn, interstitial Al and grain boundary is the key to realize effective surface texture for the as-deposited AZO films.
Journal: Applied Surface Science - Volume 255, Issue 16, 30 May 2009, Pages 7268-7272