کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5367221 1388363 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Low frictional property of copper oxide thin films optimised using a combinatorial sputter coating system
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Low frictional property of copper oxide thin films optimised using a combinatorial sputter coating system
چکیده انگلیسی

A combinatorial sputter coating system has been developed that can optimize the crystal preferred orientation of coating films. With this system, it is possible to synthesize various kinds of coatings whilst precisely controlling conditions such as the sputter gas, the gas pressure, the gas partial pressure, the r.f. power, the substrate temperature, the distance between the substrate and target, etc. In this way, we successfully synthesized copper oxide coatings with different crystal preferred orientations, and low frictional property was obtained by optimizing the crystal preferred orientation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 7, 31 January 2006, Pages 2482-2487
نویسندگان
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