کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5367225 1388363 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Schottky metal library for ZNO-based UV photodiode fabricated by the combinatorial ion beam-assisted deposition
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Schottky metal library for ZNO-based UV photodiode fabricated by the combinatorial ion beam-assisted deposition
چکیده انگلیسی

A binary alloy Schottky barrier diode on zinc oxide (ZnO) was developed using the combinatorial ion beam-assisted deposition system. The compositional fraction of the binary alloy was continuously varied using the composition-spread technique, to control the Schottky barrier height. After metal deposition, patterned Schottky diodes were fabricated on a ZnO single-crystal substrate. Pt-Ru alloy was selected from the work function viewpoint. Our experiments showed that the compositional fraction of the Schottky binary alloys changed continuously as designed and the Schottky barrier heights measured by current-voltage (I-V) measurements increased with increasing Pt content. Maximum barrier height difference for ZnO was 137 meV. Using ion beam deposition in parallel with the combinatorial system showed that the Schottky barrier heights for ZnO can be controlled by binary metal alloying.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 7, 31 January 2006, Pages 2503-2506
نویسندگان
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