Silicon rich silicon oxide films deposited by radio frequency plasma enhanced chemical vapor deposition method: Optical and structural properties

Silicon rich silicon oxide films have been deposited by plasma enhanced chemical vapour deposition using a gas mixture of silane, carbon-di-oxide and hydrogen. Silicon nanocrystals formations in the as deposited silicon rich silicon oxide films have been detected by high resolution transmission electron microscopy, scanning electron microscopy, Raman scattering and X-ray diffraction studies. Structural changes under different deposition condition have been studied by Fourier transform infrared spectroscopy. The oxygen and hydrogen bonding configurations have been obtained from Fourier transform infrared spectroscopy. Room temperature photoluminescence spectra have been observed for the as deposited films. The structural properties together with photoluminescence spectra allowed us to gain insight about the Si nanocrystal formation.

► Nc-Si silicon rich silicon oxide films have been realised through RF PECVD technique. ► Nanocrystals formation have been observed in the as deposited condition. ► Hydrogen dilution of silane strongly affects the microstructure of the films. ► SRSO films reveal the presence of room temperature visible PL spectra. ► SRSO films can be successfully used in the absorber layer of solar cell.