Inhomogeneous optoelectronic and microstructure property distribution across the substrate of ZnO:Al films deposited by room temperature magnetron sputtering

► Property distributions for low temperature sputtered ZAO films were studied. ► Films from different substrate regions have distinctive properties. ► The uneven distributions are heavily dependent on the substrate-target distance. ► Electrical properties of ZAO have strong relations with (0 0 2) and (1 1 0) textures.