کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5367367 1388365 2011 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Study of microstructure and nanomechanical properties of Zr films prepared by pulsed magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Study of microstructure and nanomechanical properties of Zr films prepared by pulsed magnetron sputtering
چکیده انگلیسی

- Development of Zr metallic films by pulsed DC magnetron sputtering is reported.
- Zr films revealed predominantly [0 0 1] texture.
- Hexagonal shaped crystallites seem to grow along the surface normal of the substrate for the films deposited at 773 K.
- Hardness of the films is in the range 6-10 GPa.
- The scratch test indicated the films deposited at higher substrate temperatures had excellent bonding with the substrate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 257, Issue 23, 15 September 2011, Pages 9909-9914
نویسندگان
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