Pulsed laser deposition of semiconducting crystalline double-doped barium titanate thin films on nickel substrates

We synthesized by pulsed laser deposition (Ba,Sr,Y)TiO3 and (Ba,Pb,Y)TiO3 thin films on mechanically polished nickel substrates.The synthesized thin films were analyzed for: crystalline structure by X-ray diffractometry, morphology and surface topography by atomic force microscopy, optical and scanning electron microscopy, and elemental composition by energy dispersive X-ray spectroscopy and electrical properties by electrical measurements.We have shown that film properties were determined by the dopants, target composition, and deposition parameters (oxygen pressure, substrate temperature and incident laser fluence). All films exhibited a semiconducting behavior, as proved by the decrease of electrical resistance with heating temperature.

Research highlights▶ We extended the application of pulsed laser deposition to the synthesis of two types of cubic double-doped BaTiO3 (Sr,Y and respectively Pb,Y) thin films with semiconducting properties, for microelectronics applications, on nickel substrates. ▶ The semiconducting behavior was proved by measurements of electrical resistance vs temperature.