کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5368129 | 1388385 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Holographic lithography of a two-dimensional hexagonal structure: Effect of beam polarization
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Holographic lithography of a two-dimensional hexagonal structure: Effect of beam polarization Holographic lithography of a two-dimensional hexagonal structure: Effect of beam polarization](/preview/png/5368129.png)
چکیده انگلیسی
A comparison is made between the theoretical determination of the interference contrast function with fabricated two-dimensional hexagonal structures of submicron lattice constant. Experiments were performed using a siloxane based hybrid organic-inorganic material and a holographic lithography method.Thin hybrid structured layers were fabricated and characterized for different conditions of beam polarizations between 0° and 90°. As a result, the photo patterning appears to be strongly dependent on beam polarization in accordance with theoretical predictions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 254, Issue 4, 15 December 2007, Pages 850-854
Journal: Applied Surface Science - Volume 254, Issue 4, 15 December 2007, Pages 850-854
نویسندگان
M. Salaün, M. Audier, M. Duneau, F. Delyon,