Short pulse laser microforming of thin metal sheets for MEMS manufacturing

Continuous and long-pulse lasers have been used for the forming of metal sheets for macroscopic mechanical applications. However, for the manufacturing of micro-electro-mechanical systems (MEMS), the applicability of such type of lasers is limited by the long-relaxation-time of the thermal fields responsible for the forming phenomena. As a consequence of such slow relaxation, the final sheet deformation state is attained only after a certain time, what makes the generated internal residual stress fields more dependent on ambient conditions and might make difficult the subsequent assembly process for MEMS manufacturing from the point of view of residual stresses due to adjustment.The use of ns laser pulses provides a suitable parameter matching for the laser forming of an important range of sheet components used in MEMS that, preserving the short interaction time scale required for the predominantly mechanic (shock) induction of deformation residual stresses, allows for the successful processing of components in a medium range of miniaturization but particularly important according to its frequent use in such systems.In the present paper, a discussion is presented on the specific features of laser interaction in the timescale and intensity range needed for thin sheet microforming with ns-pulse lasers along with relevant modelling and experimental results and a primary delimitation of the parametric space of the considered class of lasers for the referred processes.