Investigation of magnetic properties for oblique deposited granular films by magnetic field annealing

A series of (Fe57Co24Ni4Nb2B13)x-(SiO2)1−x nano-granular thin films were fabricated by magnetron sputtering with different oblique incidence angle θ and excellent soft magnetic properties are achieved. Based on the results of magnetic field anneal at different temperature Ta, it is evidenced that orientation of atomic pairs contributes to the annealing treatment, and could manipulate magnetic anisotropy. The damping coefficient α decreases with increasing angle θ and this is ascribed to the anisotropy dissipation.