کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5368494 1388399 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Roughness evolution of Si surfaces upon Ar ion erosion
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Roughness evolution of Si surfaces upon Ar ion erosion
چکیده انگلیسی

We studied the roughness evolution of Si surfaces upon Ar ion erosion in real time. Following the theory of surface kinetic roughening, a model proposed by Majaniemi was used to obtain the value of the dynamic scaling exponent β from our data. The model was found to explain both the observed roughening and the smoothening of the surfaces. The values of the scaling exponents α and β, important for establishing a universal model for ion erosion of (Si) surfaces, have been determined. The value of β proved to increase with decreasing ion energy, while the static scaling exponent α was found to be ion energy independent.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 16, 1 June 2010, Pages 5011-5014
نویسندگان
, , , , , , ,