کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5368522 | 1388400 | 2006 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The ultimate in real-time ellipsometry: Multichannel Mueller matrix spectroscopy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A review of the techniques and applications of multichannel ellipsometry in the dual-rotating-compensator configuration is given. This ellipsometric approach has been established as the ultimate in real-time, single-spot optical measurement, as it determines the entire 16-element Mueller matrix of a sample over a wide spectral range (up to 1.7-5.3Â eV) from raw data collected over a single optical period of 0.25Â s. The sequence of optical elements for this ellipsometer is denoted PC1rSC2rA, where P, S, and A represent the polarizer, sample, and analyzer. C1r and C2r represent two MgF2 rotating compensators, either biplates or monoplates that rotate synchronously at frequencies of Ï1Â =Â 5Ï and Ï2Â =Â 3Ï, where Ï/Ï is the fundamental optical period. Previous high-speed Mueller matrix measurements with this instrument have been performed on uniform, weakly anisotropic samples such as (110) Si, in which case one can extract the bulk isotropic and near-surface anisotropic optical responses simultaneously. In such an application, the instrument is operated at its precision/accuracy limits. Here, ex situ results on a strongly anisotropic, locally biaxial film are presented that demonstrate instrument capabilities for real-time analysis of such films during fabrication or modification. In addition, the use of the instrument as a real-time probe to extract surface roughness evolution on three different in-plane scales for an isotropic film surface is demonstrated for the first time.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 1, 31 October 2006, Pages 38-46
Journal: Applied Surface Science - Volume 253, Issue 1, 31 October 2006, Pages 38-46
نویسندگان
Chi Chen, M.W. Horn, Sean Pursel, C. Ross, R.W. Collins,