کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5368811 1388410 2006 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Determination of energy dependent ionization probabilities of sputtered particles
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Determination of energy dependent ionization probabilities of sputtered particles
چکیده انگلیسی

We present a novel method to determine the spectral ionization probability of sputtered species as a function of their emission velocity or energy. The technique is based on detection of neutral and ionic species in a reflectron time-of-flight mass spectrometer under otherwise identical experimental conditions. Using a pulsed ion extraction scheme in combination with sufficiently short primary ion pulses, the spectral ionization probability α+(v) can be determined without knowledge of possible energy discrimination effects in instrument transmission. Comparing the measured ionization probability with theoretical predictions, we find that none of the prevailing ionization models is capable of describing the experimental data over the whole velocity range studied.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 19, 30 July 2006, Pages 6452-6455
نویسندگان
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