کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5368950 | 1388414 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Modification and smoothing of patterned surface by gas cluster ion beam irradiation
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Modification and smoothing of patterned surface by gas cluster ion beam irradiation Modification and smoothing of patterned surface by gas cluster ion beam irradiation](/preview/png/5368950.png)
چکیده انگلیسی
Surface modification and smoothing of patterned surfaces with gas cluster ion beams were studied. In this work, line and space patterns having various intervals and depths were created on amorphous carbon films by focused Ga+ ion beams, and subsequently, Ar GCIB irradiations on the pattern were performed. When the acceleration voltage of Ar cluster ions was 20Â kV, the grooves, whose interval was below 200Â nm, were planarized. However, it required much higher ion dose for wider interval of patterns. It is estimated that the distance of lateral motions induced by one cluster ion impact defines the spatial wavelength dependence of smoothing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 4, 30 November 2009, Pages 1110-1113
Journal: Applied Surface Science - Volume 256, Issue 4, 30 November 2009, Pages 1110-1113
نویسندگان
T. Hirota, N. Toyoda, A. Yamamoto, I. Yamada,