کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5369032 | 1388419 | 2009 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Stress relaxation induced faceted Cu and W particles on the surfaces of Cu-Zr and W thin films
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Faceted copper and tungsten particles in submicron-scale were obtained by annealing copper-zirconium thin films on polyimide (PI) substrates as well as in the deposited tungsten films on Si substrates. It was interesting to find that the Cu particles are faceted and seem to be single crystal from their extraordinarily regular appearance. However, it is another case for W particles which are polycrystalline and irregular. Different mechanisms are put forward to elucidate the formation of Cu and W particles according to the morphological characterization, residual stress analysis and their distinct atomic diffusivity.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 255, Issue 22, 30 August 2009, Pages 8972-8977
Journal: Applied Surface Science - Volume 255, Issue 22, 30 August 2009, Pages 8972-8977
نویسندگان
H.L. Sun, Z.X. Song, F. Ma, K.W. Xu,