کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5369230 | 1388425 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication](/preview/png/5369230.png)
چکیده انگلیسی
In this work was investigated numerically and experimentally a simple laser doping method employing borosilicate (BSG) glass films as dopant sources which are deposited onto Si by the spin-coating technique. Both short (20Â ns) and long (200Â ns) pulse duration Excimer laser beams were used to deposit a large amount of energy in short time onto the near-surface region. Under suitable conditions, the irradiation leads to surface melting and dopant incorporation by liquid phase diffusion from the surface. Boron distribution profiles in the two-pulse duration regimes were studied as well as their electrical properties, and the junction formation of less than 25Â nm in depth was demonstrated.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 13, 30 April 2006, Pages 4502-4505
Journal: Applied Surface Science - Volume 252, Issue 13, 30 April 2006, Pages 4502-4505
نویسندگان
S. Coutanson, E. Fogarassy, J. Venturini,