کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5369274 1388425 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Excimer laser ablation of thin titanium oxide films on glass
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Excimer laser ablation of thin titanium oxide films on glass
چکیده انگلیسی

Thin titanium dioxide films are deposited on glass substrates by magnetron sputter deposition. They are irradiated in air, by means of a KrF excimer laser. The ablation rate is measured as a function of the laser fluence per pulse, F, and of the number of pulses, N. Above a fluence threshold, the films are partially ablated. The ablated thickness does not vary linearly with N. This is the signature of a negative feedback between the film thickness and the ablation rate. The origin of this negative feedback is shown to be due to either thermal or electronic effects, or both. At high F, the film detachs from the substrate.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 13, 30 April 2006, Pages 4722-4727
نویسندگان
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