کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5369286 1388425 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of laser pulse shape on dry laser cleaning
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Influence of laser pulse shape on dry laser cleaning
چکیده انگلیسی

The influence of laser pulse shape and pulse duration on dry laser cleaning is investigated by means of combined experimental and theoretical approaches. Possibilities to enhance damage-free particle removal efficiency by adjusting the temporal parameters of laser irradiations are discussed. The numerical description predicts that the removal of sub-micron particles by excimer lasers occurs in the 'quasi-static' inertia force regime. Experiments are based on an electro-optic gating system capable of switching off either leading or trailing edges of an excimer laser pulse. It is demonstrated that the inertia force corresponding to the pulse trailing front may play a role in laser cleaning but not as the dominant mechanism. Both the surface temperature and the expansion dynamics of materials are calculated in order to examine their role in dry laser cleaning. This study helps to determine the dominant mechanism responsible for particle removal by nanosecond laser pulses.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 13, 30 April 2006, Pages 4786-4791
نویسندگان
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