کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5369295 | 1388425 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition](/preview/png/5369295.png)
چکیده انگلیسی
Indium tin oxide (ITO) thin films were prepared by pulsed laser deposition (PLD) on glass substrate at room temperature. Structural, optical, and electrical properties of these films were analyzed in order to investigate its dependence on oxygen pressure, and rapid thermal annealing (RTA) temperature. High quality ITO films with a low resistivity of 3.3 Ã 10â4 Ω cm and a transparency above 90% were able to be formed at an oxygen pressure of 2.0 Pa and an RTA temperature of 400 °C. A four-point probe method, X-ray diffraction (XRD), atomic force microscopy (AFM), and UV-NIR grating spectrometer are used to investigate the properties of ITO films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 13, 30 April 2006, Pages 4834-4837
Journal: Applied Surface Science - Volume 252, Issue 13, 30 April 2006, Pages 4834-4837
نویسندگان
Jong Hoon Kim, Kyung Ah Jeon, Gun Hee Kim, Sang Yeol Lee,