کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5369448 | 1388433 | 2008 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation Gadolinium oxide high-k gate dielectrics prepared by anodic oxidation](/preview/png/5369448.png)
The growth and properties of gadolinium oxide (Gd2O3) films prepared by anodic oxidation were investigated. Uniform Gd2O3 thin film with good oxide quality was obtained. The X-ray diffraction (XRD) pattern of the Gd2O3 films showed that they had a poly-crystalline structure. The dielectric constants of Gd2O3 films oxidized at 30 and 60Â V are 9.4 and 12.2, respectively. The equivalent oxide thickness (EOT) of the Gd2O3 stacked oxide is in the range of 5.8-9.4Â nm. The MOS capacitor with Gd2O3 exhibits interesting electrical properties. Longer oxidation time reduced the leakage current density for 30Â V anodic oxidation but increased the leakage current density for 60Â V anodic oxidation. This work reveals that Gd2O3 could also be an alternative dielectric for Si substrate and therefore, might pave the way to fabricate CMOS devices in the future.
Journal: Applied Surface Science - Volume 254, Issue 17, 30 June 2008, Pages 5487-5491