کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5369589 | 1388443 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Micro-structuring of TiO2 thin films by laser-assisted diffraction processing
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Micro-structuring of TiO2 thin films by laser-assisted diffraction processing Micro-structuring of TiO2 thin films by laser-assisted diffraction processing](/preview/png/5369589.png)
چکیده انگلیسی
Thin films of TiO2 are deposited by magnetron sputtering on glass substrate and are irradiated by UV radiation using a KrF excimer laser (248Â nm). These thin films are patterned with a razor blade placed on the way of the radiation just in front of the TiO2 thin film. Just near the edge of the razor blade on the thin film, diffraction lines are observed, resulting in the ablation of the film. These patterns are characterized by optical microscopy, mechanical profilometry. Diffraction up to the 35th order is observed. The results are shown to be compatible with a model in which electronic excitation plays the major role.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 19, 31 July 2007, Pages 7890-7894
Journal: Applied Surface Science - Volume 253, Issue 19, 31 July 2007, Pages 7890-7894
نویسندگان
O. Van Overschelde, G. Guisbiers, M. Wautelet,