Conformal coverage for two-dimensional arrays of microcavites with quasi-three dimensional confinement by distributed Bragg reflectors

Different from conventional three-dimensional confined microcavity fabrication method in which micropillar microcavities were obtained through the etching of planar semicoductor microcavities, we adopted the conformal coverage to fabricate two-dimensional arrays of quasi three-dimensional confined optical microcavities providing both vertical and lateral optical confinement by the distributed Bragg reflectors (DBRs). Our microcavity samples were directly deposited on the patterned substrates with two-dimensional arrays of air holes. The SEM and cross-section TEM images show that the periodicity of the patterned substrate was still kept after deposition while the growth of DBRs along the sidewalls occurred simultaneously, which provided the transverse optical confinement. In order to probe the optical modes of this kind of microcavities, room temperature photoluminescence signals from prepared microcavities were detected. Three resonant modes were presented and exhibited obvious angular dependence. We attributed these phenomena to quantization of the in-plane wave vector components confined by lateral DBRs.