کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5370067 | 1388470 | 2006 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Annealing effects on the microstructure of amorphous carbon nitride films
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کلمات کلیدی
68.60.Dv68.37.Lp - 68.37 لیتر68.55.−a - 68.55.-a79.60.−i - 79.60.-منMicrostructure - ساختار(بافت) ذره ای و کوچکX-ray photoelectron spectroscopy - طیف سنجی فوتوالکتر اشعه ایکسCarbon nitride films - فیلم های نیترید کربنhigh-resolution transmission electron microscopy - میکروسکوپ الکترونی انتقال با وضوح بالاThermal stability - پایداری حرارتی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Annealing effects on the microstructure of amorphous carbon nitride films Annealing effects on the microstructure of amorphous carbon nitride films](/preview/png/5370067.png)
چکیده انگلیسی
Amorphous carbon nitride films, prepared using a dc facing-target reactive sputtering system, were annealed at temperatures up to 650 °C for 1 h in vacuum. The effects of heat treatment on the films, i.e. changes in the composition and structure, were investigated. It was found that annealing at temperatures ranging from 300 to 650 °C, results in the N content decreasing from â¼33 at.% in the as-deposited films to â¼5 at.%. The loss of N, especially those bonded to sp3C, causes the rearrangement of the film's microstructure, and the dual effects of the thermal annealing are quite noticeable: (1) annealing destroys most graphite-like structures, and more non-aromatic sp2C components and Câ¡N terminal structures are formed at higher annealing temperatures, contributing to a looser film's structure. (2) Annealing makes the remaining aromatic sp2C structure become more order. The results also reveal that N atoms bonded to sp3C are easily removed with the increasing temperature compared to those bonded to sp2C, which indicates that Nsp2C bonds had a higher thermal stability than Nsp3C.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 4, 15 December 2006, Pages 2087-2092
Journal: Applied Surface Science - Volume 253, Issue 4, 15 December 2006, Pages 2087-2092
نویسندگان
X.C. Wang, Z.Q. Li, P. Wu, E.Y. Jiang, H.L. Bai,