کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5370183 1388475 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition
چکیده انگلیسی

High quality transparent conductive ZnO thin films were deposited on quartz glass substrates using pulsed laser deposition (PLD). We varied the growth conditions such as the substrate temperature and oxygen pressure. X-ray diffraction (XRD), X-ray photoelectron spectrometer (XPS), and atomic force microscopy (AFM) measurements were done on the samples. All films show n-type conduction, the best transparent conductive oxide (TCO) performance (Al-doped ZnO = 1.33 × 10−4 Ω cm, Ga-doped ZnO = 8.12 × 10−5 Ω cm) was obtained on the ZnO film prepared at pO2 = 5 mTorr and Ts = 300 °C.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 3, 30 November 2006, Pages 1522-1527
نویسندگان
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