کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5370521 | 1388499 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices](/preview/png/5370521.png)
چکیده انگلیسی
Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4 μm wide) separated from the large electrode (20 μm wide) by 20 μm and 6 μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (â¼100 °C) due to low Tg of polymeric material. The fluidic velocity measurement shows a maximum of about 450 μm/s in a 150 μm channel width of organic micro-fluidic devices after plasma surface modification.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 5, 15 December 2005, Pages 1710-1715
Journal: Applied Surface Science - Volume 252, Issue 5, 15 December 2005, Pages 1710-1715
نویسندگان
Marshal Dhayal, Hyung Gon Jeong, Jeong Sik Choi,