Real-space adsorption studies of cyclooctyne on Si(0Â 0Â 1)

► Two adsorption geometries of cyclooctyne on Si(0 0 1) were identified on the clean surface. ► A well ordered structure was observed at high coverage. ► At mid-range coverage, a non-statistical adsorption behavior was observed and simulated. ► Similar adsorption behavior as at room temperature was found at low surface temperature of 50 K.