Ultra low-k property of hydrogenated carbon nitride: Chemical evaluation

► We found that the dielectric constant of HCNx film is 1.88 ± 0.06 at 1 kHz. ► The dielectric constant of HCNx film decreases to 1.71 ± 0.06 at 5 MHz. ► The island size at the surface of HCNx is varying from 120 to 300 nm. ► The island growth number density is 2.19 × 106 /mm2. ► N/C is found to be 0.54.