Spectroscopic studies of anatase TiO2 thin films prepared by DC reactive magnetron sputtering

► Nanocrystalline TiO2 thin films grown by DC-magnetron sputtering. ► Spectroscopic studies of anatase TiO2 films. ► Adsorbed H2O molecules in anatase TiO2 revealed by Vacuum Ultraviolet Spectroscopy. ► Electronic state assignments proposed for anatase TiO2 films photoabsorption bands.