Wetting behaviours of a-C:H:Si:O film coated nano-scale dual rough surface

Dual structure surface which mimics the lotus leaf was prepared by using nano-sized metal dots as mask of the plasma etching of Si. Hydrophobic a-C:H:Si:O film was deposited on the nano-structured surface. The dual structure surface is super-hydrophobic of the wetting angle 160° and the wetting angle hysteresis less than 5°.