Nanopatterning of hydroxy-terminated self-assembled monolayer taking advantage of terminal group modification

We investigated the feasibility of a new precursor used in the formation of octenylmethoxysilane self-assembled monolayer as a high-resolution electron beam resist. The hydrophilic surface of the modified OCS SAM enables us to use it as a protein-immobilizing template, and our results open up new possibilities in future biochip fabrication.