AlGaInN metal-organic-chemical-vapor-deposition gas-phase chemistry in hydrogen and nitrogen diluents: First-principles calculations

Equilibrium structure of chain complex (CH3)3MNH2M′(CH3)2:NH3 (M, M′ = Al, Ga, In) as obtained after geometry relaxation. The propagation of chain complexes can initiate depletion of gas-phase from precursors in the MOCVD of AlGaInN compounds.