Roles of hydrogen and nitrogen in p-type doping of ZnO

This Letter is related to the roles of hydrogen and nitrogen in p-type doping of ZnO. Firstly, we introduced the recent progresses in p-type ZnO. Secondly, the experimental processes were illustrated. Thirdly, the electrical properties of ZnO films were investigated. The p-type conductivity was achieved by rapid thermal annealing. The behaviors of hydrogen and nitrogen in the as-grown and annealed ZnO films were systematically studied. Finally we drew the conclusions.