Characterization of a 3D MEMS fabricated micro-solenoid at 9.4Â T

We present for the first time a complete characterization of a micro-solenoid for high resolution MR imaging of mass- and volume-limited samples based on three-dimensional B0, B1 per unit current (B1unit) and SNR maps. The micro-solenoids are fabricated using a fully micro-electromechanical systems (MEMS) compatible process in conjunction with an automatic wire-bonder. We present 15 μm isotropic resolution 3D B0 maps performed using the phase difference method. The resulting B0 variation in the range of [−0.07 ppm to −0.157 ppm] around the coil center, compares favorably with the 0.5 ppm limit accepted for MR microscopy. 3D B1unit maps of 40 μm isotropic voxel size were acquired according to the extended multi flip angle (ExMFA) method. The results demonstrate that the characterized microcoil provides a high and uniform sensitivity distribution around its center (B1unit = 3.4 mT/A ± 3.86%) which is in agreement with the corresponding 1D theoretical data computed along the coil axis. The 3D SNR maps reveal a rather uniform signal distribution around the coil center with a mean value of 53.69 ± 19%, in good agreement with the analytical 1D data along coil axis in the axial slice. Finally, we prove the microcoil capabilities for MR microscopy by imaging Eremosphaera viridis cells with 18 μm isotropic resolution.