Self-limiting CVD of a passivating SiOx control layer on InGaAs(001)-(2x4) with the prevention of III-V oxidation

Self-limiting CVD of a passivating SiOx control layer on InGaAs(001)-(2x4) with the prevention of III-V oxidation

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 660, June 2017, Pages 31-38

Mary Edmonds, Steven Wolf, Evgueni Chagarov, Tyler Kent, Jun Hong Park, Russell Holmes, Daniel Alvarez, Ravi Droopad, Andrew C. Kummel,