Effect of the crystalline constitution of TiO2 substrates on the growth of ultrathin Mo layer

► Interfacial reaction between deposited Mo and TiO2 substrates ► MoOx nanoparticles formation due to electronic exchanges and oxygen diffusion ► Growth of MoOx depends on the TiO2 electrical properties and surface reactivity ► Oxygen diffusion dynamics evidenced by ToF-SIMS profiling