3C-SiC(001)-3 × 2 reconstructed surface analyzed by high-resolution medium energy ion scattering

► High-resolution medium energy ion scattering coupled with ab initio calculations ► 3C-SiC(001)-3 × 2 surface consists of two Si-adlayers. ► Analysis using focusing and blocking effects ► The most probable structure comprises asymmetric dimers on top and alternating long and short dimers in the 2nd adlayer. ► The structure is close to that determined by photoelectron diffraction rather than the prediction by ab initio calculations.