Dependence of the Schottky barrier on the work function at metal/SiON/SiC(0001) interfaces identified by first-principles calculations

► Density of atoms in the Al overlayer on SiON does not affect the SBH. ► The SBH for the B overlayer is lower compared with that for the Al layer. ► The SBH is controllable for metal/SiON/SiC by changing the work function of metals.