Kinetic Monte Carlo simulations of heteroepitaxial growth with an atomistic model of elasticity

► We have developed a Kinetic Monte Carlo algorithm to study the growth of heteroepitaxial thin films. ► Strain effects are included via an atomistic model of elasticity. ► Elastic model of heteroepitaxy shows agreement with continuum surface elasticity calculations. ► Submonolayer growth studies show interplay of elastic energy and surface diffusion.